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Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

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Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

Volume 1249:
J. W. Bartha
C. L. Borst
D. DeNardis
K. Kim
A. Naeemi
A. Nelson
S. S. Papa Rao
H. W. Ro
D. Toma
October 2010
1249
Out of stock in print form with no current plan to reprint
Hardback
9781605112268
AUD$123.59
exc GST
Hardback
    Description

    Product details

    October 2010
    Hardback
    9781605112268
    0 pages
    0.682kg
    Out of stock in print form with no current plan to reprint

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    Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics
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    • J. W. Bartha
    • C. L. Borst
    • D. DeNardis
    • K. Kim
    • A. Naeemi
    • A. Nelson
    • S. S. Papa Rao
    • H. W. Ro
    • D. Toma

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