Thin Films — Structure and Morphology
Thin Films — Structure and Morphology
Volume 441:
Robert C. Cammarata, Naval Research Laboratory Washington, D.C.
Eric H. Chason, Sandia National Laboratories Albuquerque
Theodore L. Einstein, University of Maryland, College Park
Ellen D. Williams, University of Maryland, College Park
Daryush Lla, Alabama A&M University Normal
Steven C. Moss, The Aerospace Corporation Los Angeles
Eric H. Chason, Sandia National Laboratories Albuquerque
Theodore L. Einstein, University of Maryland, College Park
Ellen D. Williams, University of Maryland, College Park
Daryush Lla, Alabama A&M University Normal
Steven C. Moss, The Aerospace Corporation Los Angeles
July 1997
441
Hardback
9781558993457
AUD$43.95
inc GSTHardback
An interdisciplinary group of materials scientists, physicists, chemists and engineers come together in this book to discuss recent advances in the structure and morphology of thin films. Both scientific and technological issues are addressed. Work on thin films for a host of applications including microelectronics, optics, tribology, biomedical technologies and microelectromechanical systems (MEMS) are featured. Topics include: kinetics of growth; grain growth; instabilities, segregation and ordering; silicides; metallization; stresses in thin films; deposition and growth simulations; energetic growth processes; diamond films and carbide and nitride films.
Product details
July 1997Hardback
9781558993457
793 pages
240 × 160 mm
1.273kg
Out of stock in print form with no current plan to reprint
