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In-Situ Patterning:

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In-Situ Patterning:

In-Situ Patterning:

Selective Area Deposition and Etching
Volume 158:
Anthony F. Bernhardt, Lawrence Livermore National Laboratory, California
Jerry G. Black, Massachusetts Institute of Technology
Robert Rosenberg, IBM T J Watson Research Center, New York
July 1990
158
Hardback
9781558990463
$40.99
USD
Hardback
USD
Paperback
    Description

    Product details

    July 1990
    Hardback
    9781558990463
    522 pages
    229 × 152 × 29 mm
    0.86kg
    Available

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      Editors
    • Anthony F. Bernhardt , Lawrence Livermore National Laboratory, California
    • Jerry G. Black , Massachusetts Institute of Technology
    • Robert Rosenberg , IBM T J Watson Research Center, New York

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