Semiconductor-on-Insulator and Thin Film Transistor Technology
Semiconductor-on-Insulator and Thin Film Transistor Technology
Volume 53:
A. Chiang, Xerox Palo Alto Research Center, Stanford University, California
M. W. Geis, MIt Lincoln Laboratory, Lexington, Massachusetts
L. Pfeiffer, AT&T Bell Laboratories, New Jersey
M. W. Geis, MIt Lincoln Laboratory, Lexington, Massachusetts
L. Pfeiffer, AT&T Bell Laboratories, New Jersey
June 2014
53
Unavailable - out of print
Paperback
9781107405738
Out of Print
Paperback
Hardback
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book was first published in 2006.
Product details
June 2014Paperback
9781107405738
494 pages
229 × 25 × 152 mm
0.66kg
Unavailable - out of print
Table of Contents
- Preface
- Acknowledgments
- Part I. Zone Melting and Recrystallization
- Part II. Heteroepitaxy and Porous Silicon
- Part III. Buried Oxide and Nitride by Implantation
- Part IV. Characterization of SOI Thin Films
- Part V. Device and Circuit Applications
- Author index
- Subject index.
