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Laser and Particle-Beam Chemical Processing for Microelectronics

All titles
Laser and Particle-Beam Chemical Processing for Microelectronics

Laser and Particle-Beam Chemical Processing for Microelectronics

Volume 101:
Daniel J. Ehrlich, MIT Lincoln Laboratories, Lexington, Massachusetts
Gregg S. Higashi, AT&T Bell Laboratories, New Jersey
Modest M. Oprysko, IBM T J Watson Research Center, New York
April 1988
101
Unavailable - out of print
Hardback
9780931837692
Out of Print
Hardback
Paperback
    Description

    Product details

    April 1988
    Hardback
    9780931837692
    536 pages
    229 × 152 × 30 mm
    0.88kg
    Unavailable - out of print

    Often bought together

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    About the authors
      Editors
    • Daniel J. Ehrlich , MIT Lincoln Laboratories, Lexington, Massachusetts
    • Gregg S. Higashi , AT&T Bell Laboratories, New Jersey
    • Modest M. Oprysko , IBM T J Watson Research Center, New York

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