Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics
Volume 1249:
J. W. Bartha
C. L. Borst
D. DeNardis
K. Kim
A. Naeemi
A. Nelson
S. S. Papa Rao
H. W. Ro
D. Toma
C. L. Borst
D. DeNardis
K. Kim
A. Naeemi
A. Nelson
S. S. Papa Rao
H. W. Ro
D. Toma
October 2010
1249
Hardback
9781605112268
$94.99
USDHardback
Product details
October 2010Hardback
9781605112268
0 pages
0.682kg
Out of stock in print form with no current plan to reprint
Often bought together
Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics
: Paperback
Symposium Held April 10–12, 2007, San Francisco, California, U.S.A.
Often bought together

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