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Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing

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Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing

Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing

Volume 259:
C. Robert Helms, Stanford University, California
Masataka Hirose, Hiroshima University, Japan
Robert J. Nemanich, North Carolina State University
Gary W. Rubloff, IBM T J Watson Research Center, New York
November 1992
259
Out of stock in print form with no current plan to reprint
Hardback
9781558991545
£22.99
GBP
Hardback
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    Product details

    November 1992
    Hardback
    9781558991545
    0 pages
    0.932kg
    Out of stock in print form with no current plan to reprint

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    • C. Robert Helms , Stanford University, California
    • Masataka Hirose , Hiroshima University, Japan
    • Robert J. Nemanich , North Carolina State University
    • Gary W. Rubloff , IBM T J Watson Research Center, New York

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