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Impurity Diffusion and Gettering in Silicon

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Impurity Diffusion and Gettering in Silicon

Impurity Diffusion and Gettering in Silicon

Volume 36:
Richard B. Fair, Microelectronics Center of North Carolina, Research Triangle Park, North Carolina
Charles W. Pearce, AT&T Technologies, Allentown, Pennsylvania
Jack Washburn, University of California, Berkeley
June 2014
36
May 1985
Paperback
9781107405608
AUD$45.41
exc GST
Paperback
    Description

    Product details

    June 2014
    May 1985
    Paperback
    9781107405608
    300 pages
    229 × 152 × 16 mm
    0.41kg
    Available

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    • Richard B. Fair , Microelectronics Center of North Carolina, Research Triangle Park, North Carolina
    • Charles W. Pearce , AT&T Technologies, Allentown, Pennsylvania
    • Jack Washburn , University of California, Berkeley

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