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Laser and Particle-Beam Chemical Processing for Microelectronics

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Laser and Particle-Beam Chemical Processing for Microelectronics

Laser and Particle-Beam Chemical Processing for Microelectronics

Volume 101:
Daniel J. Ehrlich, MIT Lincoln Laboratories, Lexington, Massachusetts
Gregg S. Higashi, AT&T Bell Laboratories, New Jersey
Modest M. Oprysko, IBM T J Watson Research Center, New York
No date available
101
Paperback
9781107411043
Paperback
    Description

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    No date available
    Paperback
    9781107411043
    534 pages
    229 × 152 × 27 mm
    0.71kg

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    • Daniel J. Ehrlich , MIT Lincoln Laboratories, Lexington, Massachusetts
    • Gregg S. Higashi , AT&T Bell Laboratories, New Jersey
    • Modest M. Oprysko , IBM T J Watson Research Center, New York

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