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Science and Technology of Microfabrication

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Science and Technology of Microfabrication

Science and Technology of Microfabrication

Volume 76:
R. E. Howard, AT&T Bell Laboratories, New Jersey
E. L. Hu, University of California, Santa Barbara
S. Namba, University of Osaka, Japan
S. W. Pang, Massachusetts Institute of Technology
No date available
76
Paperback
9781107411166
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    No date available
    Paperback
    9781107411166
    394 pages
    229 × 152 × 21 mm
    0.53kg

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    • R. E. Howard , AT&T Bell Laboratories, New Jersey
    • E. L. Hu , University of California, Santa Barbara
    • S. Namba , University of Osaka, Japan
    • S. W. Pang , Massachusetts Institute of Technology

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