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Plasma Synthesis and Etching of Electronic Materials

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Plasma Synthesis and Etching of Electronic Materials

Plasma Synthesis and Etching of Electronic Materials

Volume 38:
R. P. H. Chang, AT&T Bell Laboratories, New Jersey
B. Abeles, Exxon Research and Engineering Co., Annandale, New Jersey
No date available
38
Paperback
9781107405707
Paperback
    Description

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    No date available
    Paperback
    9781107405707
    540 pages
    229 × 28 × 152 mm
    0.72kg

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    • R. P. H. Chang , AT&T Bell Laboratories, New Jersey
    • B. Abeles , Exxon Research and Engineering Co., Annandale, New Jersey

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