Advanced Metallization Conference in 1998 (AMC 1998)

Advanced Metallization Conference in 1998 (AMC 1998)
Volume 14:
Gurtej S. Sandhu, Micron Technology, Inc., Boise, Idaho
Heinrich Koerner, Siemens AG, Munich
Masanori Murakami, Kyoto University, Japan
Yukio Yasuda, Nagoya University, Japan
Nobuyoshi Kobayashi, Hitachi, Ltd., Tokyo
Heinrich Koerner, Siemens AG, Munich
Masanori Murakami, Kyoto University, Japan
Yukio Yasuda, Nagoya University, Japan
Nobuyoshi Kobayashi, Hitachi, Ltd., Tokyo
February 2000
14
Hardback
9781558994843
AUD$42.68
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Product details
February 2000Hardback
9781558994843
804 pages
235 × 160 × 44 mm
1.17kg
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- Gurtej S. Sandhu , Micron Technology, Inc., Boise, Idaho
- Heinrich Koerner , Siemens AG, Munich
- Masanori Murakami , Kyoto University, Japan
- Yukio Yasuda , Nagoya University, Japan
- Nobuyoshi Kobayashi , Hitachi, Ltd., Tokyo
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