Advanced Metallization and Interconnect Systems for ULSI Applications in 1997
Advanced Metallization and Interconnect Systems for ULSI Applications in 1997
Volume 13:
Robin Cheung, Advanced Micro Devices, Inc., Sunnyvale
Jeffrey Klein, Motorola, Inc, Austin, Texas
Kazuo Tsubouchi, Tohoku University, Japan
Masanori Murakami, Kyoto University, Japan
Nobuyoshi Kobayashi, Hitachi, Ltd., Tokyo
Jeffrey Klein, Motorola, Inc, Austin, Texas
Kazuo Tsubouchi, Tohoku University, Japan
Masanori Murakami, Kyoto University, Japan
Nobuyoshi Kobayashi, Hitachi, Ltd., Tokyo
February 2000
13
Hardback
9781558994126
AUD$43.95
inc GSTHardback
Product details
February 2000Hardback
9781558994126
0 pages
1.227kg
Out of stock in print form with no current plan to reprint
