A Guide to Hands-on MEMS Design and Prototyping
A Guide to Hands-on MEMS Design and Prototyping
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
- Provides hands-on design experience needed for working in industry, and covers state-of-the-art design and layout tools
- Solutions to the design challenge problems are provided online
- Introduces established multi-project wafer processes, focussing on design rather than process development
Product details
September 2011Paperback
9781107645790
178 pages
228 × 151 × 9 mm
0.32kg
132 b/w illus. 1 table 33 exercises
Available
Table of Contents
- 1. Introduction
- 2. Micro-mechanics
- 3. Electrostatics
- 4. Optical MEMS
- 5. Thermal MEMS
- 6. Fluidic MEMS
- 7. Package and test
- 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
