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Ion Beam Processes in Advanced Electronic Materials and Device Technology

Ion Beam Processes in Advanced Electronic Materials and Device Technology

Ion Beam Processes in Advanced Electronic Materials and Device Technology

Volume 45:
B. R. Appleton, Oak Ridge National Laboratory, Oak Ridge, Tennessee
F. H. Eisen, Rockwell International Microelectronics Research and Development Center, California
T. W. Sigmon, Stanford Electronics Laboratory, Stanford, California
June 2014
45
August 1985
Available
Paperback
9781107405684
£25.99
GBP
Paperback

    Product details

    June 2014
    August 1985
    Paperback
    9781107405684
    410 pages
    229 × 152 × 21 mm
    0.55kg
    Available
      Editors
    • B. R. Appleton , Oak Ridge National Laboratory, Oak Ridge, Tennessee
    • F. H. Eisen , Rockwell International Microelectronics Research and Development Center, California
    • T. W. Sigmon , Stanford Electronics Laboratory, Stanford, California