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Characterization of Plasma-Enhanced CVD Processes

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Characterization of Plasma-Enhanced CVD Processes

Characterization of Plasma-Enhanced CVD Processes

Volume 165:
Gerald Lucovsky, North Carolina State University
Dale E. Ibbotson, AT&T Bell Laboratories, New Jersey
Dennis W. Hess, University of California, Berkeley
No date available
165
Paperback
9781107410282
Paperback
    Description

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    No date available
    Paperback
    9781107410282
    270 pages
    229 × 152 × 14 mm
    0.37kg

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    • Gerald Lucovsky , North Carolina State University
    • Dale E. Ibbotson , AT&T Bell Laboratories, New Jersey
    • Dennis W. Hess , University of California, Berkeley

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