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Characterization of Plasma-Enhanced CVD Processes

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Characterization of Plasma-Enhanced CVD Processes

Characterization of Plasma-Enhanced CVD Processes

Volume 165:
Gerald Lucovsky, North Carolina State University
Dale E. Ibbotson, AT&T Bell Laboratories, New Jersey
Dennis W. Hess, University of California, Berkeley
June 2014
165
September 1990
Unavailable - out of print
Paperback
9781107410282
Out of Print
Paperback
USD
Hardback
    Description

    Product details

    June 2014
    September 1990
    Paperback
    9781107410282
    270 pages
    229 × 152 × 14 mm
    0.37kg
    Unavailable - out of print

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      Editors
    • Gerald Lucovsky , North Carolina State University
    • Dale E. Ibbotson , AT&T Bell Laboratories, New Jersey
    • Dennis W. Hess , University of California, Berkeley

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