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In-Situ Patterning:

In-Situ Patterning:

In-Situ Patterning:

Selective Area Deposition and Etching
Volume 158:
Anthony F. Bernhardt, Lawrence Livermore National Laboratory, California
Jerry G. Black, Massachusetts Institute of Technology
Robert Rosenberg, IBM T J Watson Research Center, New York
June 2014
158
July 1990
Paperback
9781107410350
Out of Print
Paperback
USD
Hardback

    Product details

    June 2014
    July 1990
    Paperback
    9781107410350
    520 pages
    229 × 152 × 27 mm
    0.69kg
    Unavailable - out of print
      Editors
    • Anthony F. Bernhardt , Lawrence Livermore National Laboratory, California
    • Jerry G. Black , Massachusetts Institute of Technology
    • Robert Rosenberg , IBM T J Watson Research Center, New York