Semiconductor-on-Insulator and Thin Film Transistor Technology
Semiconductor-on-Insulator and Thin Film Transistor Technology
Volume 53:
A. Chiang, Xerox Palo Alto Research Center, Stanford University, California
M. W. Geis, MIt Lincoln Laboratory, Lexington, Massachusetts
L. Pfeiffer, AT&T Bell Laboratories, New Jersey
M. W. Geis, MIt Lincoln Laboratory, Lexington, Massachusetts
L. Pfeiffer, AT&T Bell Laboratories, New Jersey
October 1986
53
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Hardback
9780931837180
$40.99
USDHardback
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book was first published in 2006.
Product details
October 1986Hardback
9780931837180
494 pages
229 × 152 × 27 mm
0.83kg
Temporarily unavailable - available from TBC
Table of Contents
- Preface
- Acknowledgments
- Part I. Zone Melting and Recrystallization
- Part II. Heteroepitaxy and Porous Silicon
- Part III. Buried Oxide and Nitride by Implantation
- Part IV. Characterization of SOI Thin Films
- Part V. Device and Circuit Applications
- Author index
- Subject index.
