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Plasma Synthesis and Etching of Electronic Materials

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Plasma Synthesis and Etching of Electronic Materials

Plasma Synthesis and Etching of Electronic Materials

Volume 38:
R. P. H. Chang, AT&T Bell Laboratories, New Jersey
B. Abeles, Exxon Research and Engineering Co., Annandale, New Jersey
June 2014
38
Unavailable - out of print
Paperback
9781107405707
Out of Print
Paperback
Hardback
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    June 2014
    Paperback
    9781107405707
    540 pages
    229 × 28 × 152 mm
    0.72kg
    Unavailable - out of print

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    • R. P. H. Chang , AT&T Bell Laboratories, New Jersey
    • B. Abeles , Exxon Research and Engineering Co., Annandale, New Jersey

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