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Characterization of Plasma-Enhanced CVD Processes

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Characterization of Plasma-Enhanced CVD Processes

Characterization of Plasma-Enhanced CVD Processes

Volume 165:
Gerald Lucovsky, North Carolina State University
Dale E. Ibbotson, AT&T Bell Laboratories, New Jersey
Dennis W. Hess, University of California, Berkeley
September 1990
165
Temporarily unavailable - available from TBC
Hardback
9781558990531
$40.99
USD
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    Product details

    September 1990
    Hardback
    9781558990531
    270 pages
    229 × 152 × 16 mm
    0.53kg
    Temporarily unavailable - available from TBC

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    • Gerald Lucovsky , North Carolina State University
    • Dale E. Ibbotson , AT&T Bell Laboratories, New Jersey
    • Dennis W. Hess , University of California, Berkeley

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