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Advanced Metallization Conference 2007 (AMC 2007)

Advanced Metallization Conference 2007 (AMC 2007)

Advanced Metallization Conference 2007 (AMC 2007)

Volume 23:
Andrew J. McKerrow, Novellus Systems Inc., Tualatin, Oregon
Yosi Sacham-Diamand, Tel-Aviv University
Shoso Shingubara, Kansai University, Osaka
Yukihiro Shimogaki, University of Tokyo
May 2008
23
Hardback
9781558999923
$93.99
USD
Hardback

    The Advanced Metallization Conference - held in Albany, New York, and Tokyo, Japan - marked its 24th anniversary in 2007. These two sister conferences form a unique “one conference at two sites” that focuses on latest R&D and manufacturing results, as well as real-world integration and reliability data on the application of metallization and related technologies for advanced IC devices. Scientists and engineers from around the world came to listen and present state-of-the-art work in the field of ULSI interconnect technology including metallization, dielectrics, integration, packaging, design and vertical integration. Great progress has been made in ULSI metallization, but new challenges in performance, reliability and integration are expected as dimension continues to shrink. The importance of continued basic research in nanoscience and technology, using either metal wires or new materials such as carbon nanotubes, was declared key to the future of ULSI interconnects.

    Product details

    May 2008
    Hardback
    9781558999923
    745 pages
    235 × 160 × 43 mm
    1.16kg
    Out of stock in print form with no current plan to reprint
      Editors
    • Andrew J. McKerrow , Novellus Systems Inc., Tualatin, Oregon
    • Yosi Sacham-Diamand , Tel-Aviv University
    • Shoso Shingubara , Kansai University, Osaka
    • Yukihiro Shimogaki , University of Tokyo