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Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

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Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

Volume 11:
Russell C. Ellwanger, Novellus Systems, Inc., San Jose, California
Shi-Qing Wang, SEMATECH/National Semiconductor, Austin, Texas
February 2000
11
Available
Hardback
9781558993419
£22.99
GBP
Hardback
    Description

    Product details

    February 2000
    Hardback
    9781558993419
    0 pages
    235 × 158 × 45 mm
    1.26kg
    Available

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    • Russell C. Ellwanger , Novellus Systems, Inc., San Jose, California
    • Shi-Qing Wang , SEMATECH/National Semiconductor, Austin, Texas

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